Exhaust pump, communicating pipe, and exhaust system
US8356970B2 · kind B2 · utility
2Cited by
1References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 24, 2008 |
| Grant date | Jan 22, 2013 |
| Priority date | — |
| Expiry date | Oct 23, 2031 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D29/701
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
An exhaust pump that prevents particles from entering a processing chamber of a substrate processing apparatus. The exhaust pump connected to the processing chamber has rotary blades and an air intake portion disposed on the processing chamber side of the rotary blades. A shielding unit is disposed inside the air intake portion and shields the rotary blades when the air intake portion is viewed from the processing chamber side.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.