Microcalorimetry for X-ray spectroscopy
US8357894B2 · kind B2 · utility
15Cited by
8References
21Claims
0Family size
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Key dates
| Filing date | Aug 10, 2010 |
| Grant date | Jan 22, 2013 |
| Priority date | — |
| Expiry date | May 8, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2442
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An improved microcalorimeter-type energy dispersive x-ray spectrometer provides sufficient energy resolution and throughput for practical high spatial resolution x-ray mapping of a sample at low electron beam energies. When used with a dual beam system that provides the capability to etch a layer from the sample, the system can be used for three-dimensional x-ray mapping. A preferred system uses an x-ray optic having a wide-angle opening to increase the fraction of x-rays leaving the sample that impinge on the detector and multiple detectors to avoid pulse pile up.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.