System and method for height triangulation measurement
US8363229B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 1, 2005 |
| Grant date | Jan 29, 2013 |
| Priority date | — |
| Expiry date | Jul 27, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/022
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for height triangulation measurement particularly for measuring the height of an object on a surface, the method includes: a) illuminating said object from a known angle with a narrow strip of light, having a large numerical aperture along said light strip and a small numerical aperture perpendicular to said light strip; b) imaging said object from a known angle having a large numerical aperture along said light strip and a small numerical aperture perpendicular to said light strip, having an image of said object illuminated by said light strip; and c) calculating the height of said object from the location of said light strip on said image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.