Plasma-resistant ceramics with controlled electrical resistivity
US8367227B2 · kind B2 · utility
69Cited by
41References
8Claims
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Key dates
| Filing date | Aug 2, 2007 |
| Grant date | Feb 5, 2013 |
| Priority date | — |
| Expiry date | Nov 15, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Specialty ceramic materials which resist corrosion/erosion under semiconductor processing conditions which employ a corrosive/erosive plasma. The corrosive plasma may be a halogen-containing plasma. The specialty ceramic materials have been modified to provide a controlled electrical resistivity which suppresses plasma arcing potential.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.