Optical detection method and optical MEMS detector, and method for making MEMS detector
US8368005B2 · kind B2 · utility
20Cited by
6References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 30, 2009 |
| Grant date | Feb 5, 2013 |
| Priority date | — |
| Expiry date | Jul 20, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/0802
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention discloses an optical MEMS detector, comprising: a substrate; at least one photo diode in a region within the substrate; an isolation wall above the substrate and surrounding the photo diode region; and at least one movable part having an opening for light to pass through and reach the photo diode, wherein when the at least one movable part is moved, an amount of light reaching the photo diode is changed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.