Scanning probe microscopy employing correlation pattern recognition
US8371155B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Aug 10, 2010 |
| Grant date | Feb 12, 2013 |
| Priority date | — |
| Expiry date | Apr 19, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q30/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and associated method for topographically characterizing a workpiece. A scanning probe obtains topographical data from the workpiece. A processor controls the scanning probe to scan a reference surface of the workpiece to derive a first digital file and to scan a surface of interest that includes at least a portion of the reference surface to derive a second digital file. Correlation pattern recognition logic integrates the first and second digital files together to align the reference surface with the surface of interest.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.