Patent · US Active

In-plane sensor, out-of-plane sensor, and method for making same

US8371167B2 · kind B2 · utility

2Cited by

12References

16Claims

0Family size

Assignee

PIXART IMAGING INC. · TW

Inventors

Chuan-Wei Wang · Hsinchu, TW
Sheng-Ta Lee · Hsinchu, TW

Key dates

Filing date	Aug 4, 2009
Grant date	Feb 12, 2013
Priority date	—
Expiry date	Mar 18, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG01P2015/0814
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

According to the present invention, an in-plane sensor comprises a structure unit which includes: a fixed structure including a fixed finger and a fixed column connected to each other, the fixed finger having a supported end supported by the fixed column and a suspended end; and a movable structure including at least one proof mass which surrounds the fixed finger in a horizontal plane.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.