Apparatus for forming films on substrates
US8375888B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 7, 2007 |
| Grant date | Feb 19, 2013 |
| Priority date | — |
| Expiry date | Dec 24, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49718
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A doctor blade assembly for use in combination with apparatus for forming a film on a substrate. The doctor blade assembly includes a doctor blade to be mounted on a programmable robot. The doctor blade has a bottom face and spacers at opposite ends of the body of the doctor blade extending a predetermined distance down below the bottom face of the body for contacting a substrate and spacing the bottom face from the substrate. The spacers are adjustable relative to the doctor blade for adjusting the predetermined distance according to the thickness of film to be formed on the substrate. Other aspects and methods are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.