In-situ flux measurement devices, methods, and systems
US8377518B2 · kind B2 · utility
1Cited by
55References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 15, 2012 |
| Grant date | Feb 19, 2013 |
| Priority date | — |
| Expiry date | Aug 15, 2032 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B23/005
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
In-situ flux measurement methods, devices, and systems are provided. According to some embodiments, an in-situ molecular flux device generally comprises a electrically conductive container configured to hold a precursor material, a heat source proximate the electrically conductive container to heat the precursor material to release ions such that an ion current is produced; and a current-measuring device in electrical communication with the electrically conductive container to measure the ion current associated with the heated precursor material. Other embodiments are also claimed and described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.