Patent · US Active

Device and method for the evanescent illumination of a sample

US8378314B2 · kind B2 · utility

2Cited by
7References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 28, 2009
Grant dateFeb 19, 2013
Priority date
Expiry dateFeb 6, 2030

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2021/6419
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A device for the evanescent illumination of a sample, including an optical illumination element with an optical corrective element and an objective arranged downstream from the corrective element, to evanescently illuminate the sample with a supplied ray beam containing optical radiation with at least two different wavelengths. The corrective optical element has a transverse chromatic aberration which, during the illumination, leads to the optical radiation penetrating the pupil of the objective at different heights relative to the optical axis varying according to the wavelength. The corrective optical element is selected in such a way that the wavelength-related difference of the penetration depths of the radiation into the sample is reduced during the evanescent illumination.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.