Dummy wafers in 3DIC package assemblies
US8378480B2 · kind B2 · utility
44Cited by
57References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 4, 2010 |
| Grant date | Feb 19, 2013 |
| Priority date | — |
| Expiry date | May 1, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/181
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A package structure includes a first die, and a second die over and bonded to the first die. The second die has a size smaller than a size of the first die. A dummy chip is over and bonded onto the first die. The dummy chip includes a portion encircling the second die. The dummy chip includes a material selected from the group consisting essentially of silicon and a metal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.