Method for providing alignment of a probe

US8378697B2 · kind B2 · utility

Assignee

• CAPRES A/S · DK

Inventors

• Peter Folmer Nielsen · Farum, DK
• Peter R. E. Petersen · Nørresundby, DK
• Jesper Erdman Hansen · Avenue Madeleine, DK

Key dates

• Filing date: Mar 25, 2011
• Grant date: Feb 19, 2013
• Expiry date: Mar 31, 2031

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49222
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for aligning a probe relative to a supporting substrate defining a first planar surface, an edge, and a first crystal plane includes the steps of masking the surface of the substrate to define an exposed area on the first surface at the edge; and etching, using an etch reagent, a recess in the exposed area, the recess defining first and second opposed sidewalls, an end wall remote from the edge, and a bottom wall. The method further includes the step of providing a probe substrate defining a second planar surface and a second crystal plane identical to the first crystal plane, and positioning the probe substrate so that the first and the second crystal planes are positioned identically when forming a probe from the probe substrate using the etch reagent, wherein the probe defines congruent surfaces to the first and second sidewalls.