Metal oxide metal capacitor with slot vias
US8379365B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 27, 2010 |
| Grant date | Feb 19, 2013 |
| Priority date | — |
| Expiry date | Mar 18, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A capacitor includes the first electrode including the first conductive lines and vias. The first conductive lines on the same layer are parallel to each other and connected to a first periphery conductive line. The first conductor lines are aligned in adjacent layers and are coupled to each other by the vias. The capacitor further includes a second electrode aligned opposite to the first electrode including second conductive lines and vias. The second conductive lines on the same layer are parallel to each other and connected to a second periphery conductive line. The second conductor lines are aligned in adjacent layers and are coupled to each other by the vias. The capacitor further includes oxide layers formed between the first electrode and the second electrode. The vias have rectangular (slot) shapes on a layout. In one embodiment, the conductive lines and vias are metal, e.g. copper, aluminum, or tungsten.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.