Tools and methods for mounting transport rails in a substrate processing system
US8382965B2 · kind B2 · utility
0Cited by
3References
17Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 31, 2008 |
| Grant date | Feb 26, 2013 |
| Priority date | — |
| Expiry date | Feb 6, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49895
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Devices and methods for mounting and aligning transport rails to a processing chamber of a substrate processing system are described. An alignment feature is built-in to the transport rail and a corresponding alignment feature is added to the valves separating processing chambers. The alignment feature may be a pin-groove arrangement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.