Pre-filter for a servo control loop, and applications thereof
US8392003B2 · kind B2 · utility
4Cited by
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18Claims
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Key dates
| Filing date | Dec 8, 2008 |
| Grant date | Mar 5, 2013 |
| Priority date | — |
| Expiry date | Jan 3, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70725
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method, system and computer program product to control position of an error control module in a lithography apparatus using a servo control loop is described herein. The system comprises a filter, a servo controller coupled to the filter and configured to receive a control signal and an actuator coupled to the servo controller and configured to control the position of the error control module. The filter is configured to filter the control signal by modulating the amplitude and phase of the control signal in a desired frequency range, prior to the servo control loop.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.