Method for manufacturing a monolithic oscillator with bulk acoustic wave (BAW) resonators
US8397360B2 · kind B2 · utility
3Cited by
4References
17Claims
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Key dates
| Filing date | Oct 1, 2010 |
| Grant date | Mar 19, 2013 |
| Priority date | — |
| Expiry date | Feb 3, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/4908
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A method of adjustment on manufacturing of a monolithic oscillator including circuit elements and a BAW resonator, this method including the steps of: a) forming the circuit elements and the resonator and electrically connecting them; b) covering the resonator with a frequency adjustment layer; c) measuring the output frequency of the oscillator; d) modifying the thickness of the frequency adjustment layer to modify the output frequency of the oscillator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.