Patent · US Active

Electrode and arrangement with movable shield

US8398775B2 · kind B2 · utility

0Cited by

3References

22Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Frank Stahr · Radeberg, DE
Ulf Stephan · Dresden, DE
Olaff Steinke · Radeberg, DE
Klaus Schade · Wiesbaden, DE

Key dates

Filing date	Nov 8, 2007
Grant date	Mar 19, 2013
Priority date	—
Expiry date	Feb 28, 2029

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/32761
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

The present invention comprises an electrode arrangement for a coating device with a stationary first electrode (3) and a second movable electrode (18), whose principle surfaces are opposing each other during coating, wherein the second electrode (18) may be moved along a plane parallel to the opposing principle surfaces, wherein at least one end face of an electrode running transversely to the principal surface an electrical shield (12, 19, 13) is provided, which extends at least partially parallel to the end face of one electrode, wherein at least one part (14) of the shield is formed so as to be movable.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.