Patent · US Active

System and method for use in functional failure analysis by induced stimulus

US8400175B2 · kind B2 · utility

0Cited by
18References
18Claims
0Family size

Inventor

Key dates

Filing dateJan 18, 2011
Grant dateMar 19, 2013
Priority date—
Expiry dateFeb 9, 2031

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R31/311
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A scanning/imaging system wherein an external stimulus is used for exciting a device under test (DUT). A stimulus source is included for providing a stationary stimulus with a controllable spot size to a device under test (DUT), the controllable spot size covering a portion of the DUT for excitation by the stationary stimulus. A sensor is operable for capturing at least one of a functional response signal and an optical image signal emanating from the DUT portion. A linear positioning device is operable to facilitate scanning of remaining portions of the DUT until a predetermined area thereof has been traversed. A controller is operably coupled to the linear positioning device, stimulus source and the sensor for providing the overall control thereof.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.