Patent · US Active

Wafer level contactor

US8400176B2 · kind B2 · utility

4Cited by

17References

20Claims

0Family size

Assignee

FormFactor, Inc. · US

Inventors

Brian J. Arkin · Pleasanton, US
Alistair Nicholas Sporck · Saratoga, US

Key dates

Filing date	Aug 18, 2009
Grant date	Mar 19, 2013
Priority date	—
Expiry date	Dec 25, 2029

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/54
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A probe card assembly can include a plurality of probes disposed on a substrate and arranged to contact terminals of a semiconductor wafer. Switches can be disposed on the probe card assembly and provide for selective connection and disconnection of the probes from electrical interconnections on the probe card assembly.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.