Methods for producing polycrystalline silicon that reduce the deposition of silicon on reactor walls
US8404206B2 · kind B2 · utility
2Cited by
22References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 17, 2011 |
| Grant date | Mar 26, 2013 |
| Priority date | — |
| Expiry date | Jun 17, 2031 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2219/00252
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Gas distribution units of fluidized bed reactors are configured to direct thermally decomposable compounds to the center portion of the reactor and away from the reactor wall to prevent deposition of material on the reactor wall and process for producing polycrystalline silicon product in a reactor that reduce the amount of silicon which deposits on the reactor wall.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.