Process that includes assembling together first and second substrates the have respective first and second carbon nanotube arrays with geometrically complementary patterns
US8404519B2 · kind B2 · utility
2Cited by
7References
8Claims
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Key dates
| Filing date | May 16, 2011 |
| Grant date | Mar 26, 2013 |
| Priority date | — |
| Expiry date | Jun 28, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49126
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A carbon nanotube (CNT) array is patterned on a substrate. The substrate can be a microelectronic die or a heat sink for a die. The patterned CNT array is patterned by using a patterned catalyst on the substrate to form the CNT array by growing. The patterned CNT array can also be patterned by using a patterned mask on the substrate to form the CNT array by growing. A computing system that uses the CNT array for heat transfer from the die is also used.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.