Patent · US Active

Process for reactive ion etching a layer of diamond like carbon

US8409458B2 · kind B2 · utility

0Cited by

3References

10Claims

0Family size

Assignee

TEXAS INSTRUMENTS INCORPORATED · US

Inventors

Erika Leigh Shoemaker · Richardson, US
Maria Wang · Richardson, US
Mary Alyssa Drummond Roby · Plano, US
Stuart M. Jacobsen · Frisco, US

Key dates

Filing date	Mar 2, 2007
Grant date	Apr 2, 2013
Priority date	—
Expiry date	May 1, 2028

Classification

Technology area (CPC H)Electricity
CPC primaryH10D30/601
WIPO fieldTextile and paper machines
WIPO sectorMechanical engineering

Abstract

Provided is a process for manufacturing a diamond like carbon layer. The process for manufacturing the diamond like carbon layer includes, without limitation, forming a layer of diamond like carbon over a substrate, and reactive ion etching the layer of diamond like carbon.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.