Differential FET structures for electrical monitoring of overlay
US8409882B2 · kind B2 · utility
2Cited by
7References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 13, 2009 |
| Grant date | Apr 2, 2013 |
| Priority date | — |
| Expiry date | Oct 27, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/34
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method and apparatus for determining overlay includes an array of electronic devices having structures formed in a plurality of layers and such that a device on a first end of the array includes an offset from a position of a device on a second end of the array. A measurement device is configured to measure electrical characteristics of the devices in the array to determine a transition position between the electrical characteristics. A comparison device is configured to determine an overlay between the layers based on a device associated with the transition position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.