Surface treatment agent and surface treatment method
US8410296B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 10, 2010 |
| Grant date | Apr 2, 2013 |
| Priority date | — |
| Expiry date | Mar 7, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/11
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
Provided are a surface treatment agent for which hydrophobization to a high degree is possible even in a case of the material of a substrate surface being TiN or SiN, and surface treatment method using such a surface treatment agent. The surface treatment agent according to the present invention contains a cyclic silazane compound. As this cyclic silazane compound, a cyclic disilazane compound such as 2,2,5,5-tetramethyl-2,5-disila-1-azacyclopentane and 2,2,6,6-tetramethyl-2,6-disila-1-azacyclohexane and a cyclic trisilazane compound such as 2,2,4,4,6,6-hexamethylcyclotrisilazane and 2,4,6-trimethyl-2,4,6-trivinylcyclotrisilazane are preferred. In the surface treatment, a substrate surface is exposed to a surface treatment agent according to the present invention, and the substrate surface is hydrophobized.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.