Inventor · Kawasaki, JP

Naohisa Ueno

7Patents
1h-index
11Co-inventors
40Inventor score

Filing activity: Jul 19, 2007 → Oct 28, 2015

Most-cited inventions

PatentTitleAreaCited byStatus
US8410296B2 Surface treatment agent and surface treatment method Physics 3 Active
US9436094B2 Stripping solution for photolithography and pattern formation method Physics 1 Active
US9796953B2 Cleaning liquid for lithography and method for cleaning substrate Chemistry; Metallurgy 1 Active
US9535330B2 Stripping solution for photolithography and pattern formation method Physics 0 Active
US8142980B2 Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent Electricity 0 Active
US7579138B2 Method for forming micropattern Physics 0 Active
US9291905B2 Developing solution for photolithography, method for forming resist pattern, and method and apparatus for producing developing solution for photolithography Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.