X-ray detector for electron microscope
US8410439B2 · kind B2 · utility
8Cited by
33References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 6, 2011 |
| Grant date | Apr 2, 2013 |
| Priority date | — |
| Expiry date | Dec 6, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2802
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Multiple detectors arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors preferably include a shutter and a cold shield that reduce ice formation on the detector. By providing detectors surrounding the sample, a large solid angle is provided for improved detection and x-rays are detected regardless of the direction of sample tilt.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.