Patent · US Active

Grazing incidence collector for laser produced plasma sources

US8411815B2 · kind B2 · utility

4Cited by

9References

18Claims

0Family size

Assignee

MEDIA LARIO S.R.L. · IT

Inventors

Ian Wallhead · València, ES
Fabio Zocchi · Samarate, IT

Key dates

Filing date	Jan 28, 2009
Grant date	Apr 2, 2013
Priority date	—
Expiry date	Mar 22, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG21K2201/067
WIPO fieldOptics
WIPO sectorInstruments

Abstract

Grazing incidence collectors (GICs) for extreme ultraviolet (EUV) and X-ray radiation sources, such as laser produced plasma (LPP) sources, are disclosed. Source-collector systems comprising GICs and LPP sources are also disclosed. A laser beam is directed along the collector axis to a fuel target to form the LPP source, and the collector is arranged to collect the radiation and reflect it to an intermediate focus. The collector may include one or more grazing-incidence mirrors, and these mirrors may be electroformed. lithography systems that employ the source-collector systems as disclosed herein.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.