Fabio Zocchi
11Patents
4h-index
16Co-inventors
49Inventor score
Filing activity: Sep 3, 2007 → Feb 7, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8258485B2 | Source-collector module with GIC mirror and xenon liquid EUV LPP target system | Physics | 13 | Active |
| US8330131B2 | Source-collector module with GIC mirror and LPP EUV light source | Physics | 8 | Active |
| US8390785B2 | Collector optical system | Physics | 6 | Active |
| US8411815B2 | Grazing incidence collector for laser produced plasma sources | Physics | 4 | Active |
| US8895946B2 | Source-collector modules for EUV lithography employing a GIC mirror and a LPP source | Electricity | 4 | Active |
| US8594277B2 | Grazing incidence collector optical systems for EUV and X-ray applications | Physics | 2 | Active |
| US8686381B2 | Source-collector module with GIC mirror and tin vapor LPP target system | Electricity | 2 | Active |
| US8746975B2 | Thermal management systems, assemblies and methods for grazing incidence collectors for EUV lithography | Physics | 1 | Active |
| US8344339B2 | Source-collector module with GIC mirror and tin rod EUV LPP target system | Electricity | 1 | Active |
| US9057962B2 | Source-collector module with GIC mirror and LPP EUV light source | Physics | 1 | Active |
| US8050380B2 | Zone-optimized mirrors and optical systems using same | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.