Cooling device

US8413712B2 · kind B2 · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Thomas J. Brunschwiler · Thalwil, CH
• Urs Kloter · Dietikon, CH
• Ryan Linderman · Oakland, US
• Bruno Michel · Thalwil, CH
• Hugo E. Rothuizen · Adliswil, CH

Key dates

• Filing date: Nov 13, 2006
• Grant date: Apr 9, 2013
• Expiry date: Jun 20, 2030

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2924/0002
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A cooling device has a large number of closely spaced impinging jets, adjacent an impingement gap, with parallel return paths for supplying coolant flow for the impinging jets with the least possible pressure drop using an interdigitated, branched hierarchical manifold. Surface enhancement features spanning the impingement gap form U-shaped microchannels between single impinging jets and single outlets.