Process for producing fluorocarbon microstructure, fluorocarbon microstructure, and microsystem
US8414782B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 21, 2008 |
| Grant date | Apr 9, 2013 |
| Priority date | — |
| Expiry date | Jan 21, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24479
- WIPO fieldBiotechnology
- WIPO sectorChemistry
Abstract
A process for producing a fluorocarbon microstructure capable of easily fabricating a three-dimensional fluorocarbon microstructure. The process for producing a fluorocarbon microstructure comprises a first processing step for forming, on a substrate (2), a film deposition portion with a given pattern made up of a through-hole figure by etching the substrate (2), a fabricating step for forming a fluorocarbon film (6) on an inner circumferential surface of a film deposition portion (9) to fabricate a fluorocarbon region surrounded by the fluorocarbon film (6), and a second processing step for fabricating the fluorocarbon microstructure protruding from a processing surface of the substrate (2) by etching a given region other than a fluorocarbon region on the substrate (2). Hence, the three-dimensional fluorocarbon microstructure can be fabricated which comprises a complicated structure that has conventionally been hard to fabricate. Thus, a microchannel (1) equipped with the three-dimensional fluorocarbon microstructure can be easily fabricated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.