Tri-axis accelerometer having a single proof mass and fully differential output signals

US8418559B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Zhiyu Pan · San Jose, US
• Christoph Lang · Palo Alto, US
• Gary Yama · Mountain View, US
• Matthias Metz · Zürich, CH
• Markus Ulm · Weilmünster, DE

Key dates

• Filing date: Jun 28, 2010
• Grant date: Apr 16, 2013
• Expiry date: Mar 21, 2031

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/42
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A tri-axis accelerometer includes a proof mass, at least four anchor points arranged in at least two opposite pairs, a first pair of anchor points being arranged opposite one another along a first axis, a second pair of anchor points being arranged opposite one another along a second axis, the first axis and the second axis being perpendicular to one another, and at least four spring units to connect the proof mass to the at least four anchor points, the spring units each including a pair of identical springs, each spring including a sensing unit.