Flow rate range variable type flow rate control apparatus
US8418714B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jun 22, 2006 |
| Grant date | Apr 16, 2013 |
| Priority date | — |
| Expiry date | Jul 25, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87684
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP1 (where K is a proportionality constant) or as Qc=KP2m(P1−P2)n (where K is a proportionality constant, m and n constants) by using orifice upstream side pressure P1 and/or orifice downstream side pressure P2. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.