Patent · US Active

Active non-contact probe card

US8421491B2 · kind B2 · utility

4Cited by

4References

19Claims

0Family size

Assignee

ADVANCED SEMICONDUCTOR ENGINEERING, INC. · TW

Inventors

Ming-Kun Chen
Yi-Lung Lin · New Taipei, TW

Key dates

Filing date	Mar 12, 2010
Grant date	Apr 16, 2013
Priority date	—
Expiry date	Apr 16, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG01R1/07
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Provided is an active non-contact probe card including a carrier, a support base, a piezoelectric material layer, an active sensor array chip and a control circuit. The support base is disposed on the carrier. The piezoelectric material layer is connected with the support base. The position of the active sensor array chip with respect to the carrier is determined according to the thicknesses of the support base and the thicknesses of the piezoelectric material layer. A control circuit provides a control voltage to the piezoelectric material layer to control the thickness of the piezoelectric material layer, so as to adjust the position of the active sensor array chip with respect to the carrier.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.