Optical input/output device for photo-electric integrated circuit device and method of fabricating same
US8422845B2 · kind B2 · utility
2Cited by
2References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 15, 2010 |
| Grant date | Apr 16, 2013 |
| Priority date | — |
| Expiry date | May 9, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12061
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A photo-electric integrated circuit device comprises an on-die optical input/output device. The on-die optical input/output device comprises a substrate having a trench, a lower cladding layer disposed in the trench and having an upper surface lower than an upper surface of the substrate, and a core disposed on the lower cladding layer at a distance from sidewalls of the trench and having an upper surface at substantially the same level as the upper surface of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.