Patent · US Active

Methods of forming molybdenum sputtering targets

US8425833B2 · kind B2 · utility

4Cited by

5References

18Claims

0Family size

Assignee

H.C. STARCK INC. · US

Inventors

Brad Lemon · Battle Creek, US
Joseph Hirt · Cypress, US
Timothy Welling · Portage, US
James G. Daily, III · Marshall, US
David Meendering · Coldwater, US
Gary Alan Rozak · Akron, US
Jerome O'Grady · Hudson, US
Peter R. Jepson · Newbury, US
Prabhat Kumar · Framingham, US
Steven A. Miller · Pinellas Park, US
Richard Wu · North Chelmsford, US
David G. Schwarz · Mentor, US

Key dates

Filing date	Dec 30, 2011
Grant date	Apr 23, 2013
Priority date	—
Expiry date	Dec 30, 2031

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB22F2998/10
WIPO fieldMaterials, metallurgy
WIPO sectorChemistry

Abstract

In various embodiments, tubular sputtering targets are produced by forming a tubular billet at least by pressing molybdenum powder in a mold and sintering the pressed molybdenum powder, working the tubular billet to form a worked billet, and heat treating the worked billet.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.