Tunable-illumination reflector optics for UV cure system
US8426778B1 · kind B1 · utility
19Cited by
53References
24Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 10, 2007 |
| Grant date | Apr 23, 2013 |
| Priority date | — |
| Expiry date | Feb 12, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05D3/067
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention provides improved apparatus for ultraviolet (UV) cure of thin films. A central external reflector (CER) reflects UV light at different angles to compensate for non-uniformity of the deposited film on the substrate. The CER is positioned between the UV light source and the substrate and includes an actuator that can change the angle of reflection before and during UV cure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.