System and method of non-linear grid fitting and coordinate system mapping
US8428393B2 · kind B2 · utility
12Cited by
9References
24Claims
0Family size
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Key dates
| Filing date | Mar 12, 2004 |
| Grant date | Apr 23, 2013 |
| Priority date | — |
| Expiry date | Sep 30, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T7/80
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A system and method of non-linear grid fitting and coordinate system mapping may employ data processing techniques for fitting a set of measured fiducial data to an ideal set of fiducials; the fiducials may be arranged in a known (e.g., Cartesian grid) pattern on a substrate imaged by an imaging apparatus. Exemplary embodiments may model the non-linear transformation to and from imaged coordinates (i.e., coordinates derived from acquired image data) and artifact coordinates on the fiducial plate (i.e., actual coordinates of the fiducial relative to a reference point on the fiducial plate).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.