Patent · US Active

Micromechanical pressure-sensor element and method for its production

US8429977B2 · kind B2 · utility

4Cited by

3References

11Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Marcus Ahles · Pfullingen, DE
Hubert Benzel · Neckartenzlingen, DE

Key dates

Filing date	Feb 25, 2011
Grant date	Apr 30, 2013
Priority date	—
Expiry date	Mar 26, 2031

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49103
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A very robust sensor element for an absolute-pressure measurement is described, which is suitable for high temperatures and able to be miniaturized to a large extent. The micromechanical pressure-sensor element includes a sensor diaphragm having a rear-side pressure connection and at least one dielectrically insulated piezo resistor for signal acquisition. Furthermore, the pressure-sensor element has a front-side reference volume, which is sealed by a cap structure spanning the sensor diaphragm. The cap structure is realized as thin-film structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.