Patent · US Active

Method and apparatus for forming a thin lamina

US8435804B2 · kind B2 · utility

0Cited by

15References

23Claims

0Family size

Assignee

GTAT Corporation · US

Inventors

Adam Kell · Orinda, US
Robert Clark-Phelps · Northborough, US
Joseph Gillespie · Boston, US
Gopal Prabhu · San Jose, US
Takao Sakase · Rowley, US
Theodore H. Smick · Essex, US
Steve Zuniga · Soquel, US
Steve Bababyan · Los Altos, US

Key dates

Filing date	Dec 20, 2011
Grant date	May 7, 2013
Priority date	—
Expiry date	Dec 20, 2031

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T156/1132
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A method for producing a lamina from a donor body includes implanting the donor body with an ion dosage and separably contacting the donor body with a susceptor assembly, where the donor body and the susceptor assembly are in direct contact. A lamina is exfoliated from the donor body, and a deforming force is applied to the lamina or to the donor body to separate the lamina from the donor body.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.