Capacitor with pillar type storage node and method for fabricating the same
US8441100B2 · kind B2 · utility
1Cited by
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13Claims
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Key dates
| Filing date | Mar 22, 2011 |
| Grant date | May 14, 2013 |
| Priority date | — |
| Expiry date | Mar 22, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10B12/033
Abstract
A capacitor includes a pillar-type storage node, a supporter disposed entirely within an inner empty crevice of the storage node, a conductive capping layer over the supporter and contacting the storage node so as to seal an entrance to the inner empty crevice, a dielectric layer over the storage node, and a plate node over the dielectric layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.