Patent · US Active

Contactor and method of production of contactor

US8441271B2 · kind B2 · utility

3Cited by

9References

30Claims

0Family size

Assignee

ADVANTEST CORPORATION · JP

Inventors

Hidenori Kitazume · Tokyo, JP
Koji Asano · Sendai, JP

Key dates

Filing date	Mar 12, 2008
Grant date	May 14, 2013
Priority date	—
Expiry date	Jan 29, 2030

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49204
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A contactor includes: a silicon layer composing a part of beam part with a rear end side provided at a base part and with a front end side sticking out from the base part; SiO2 layer as an insulating layer formed on the silicon layer; and a conductive layer formed on the SiO2 layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.