Patent · US Active

Reconfigurable spectroscopic ellipsometer

US8446584B2 · kind B2 · utility

5Cited by

7References

8Claims

0Family size

Assignee

KLA-TENCOR CORPORATION · US

Inventors

Shankar Krishnan · Santa Clara, US
Haiming Wang · 安丰镇, CN

Key dates

Filing date	May 13, 2011
Grant date	May 21, 2013
Priority date	—
Expiry date	Feb 2, 2032

Classification

Technology area (CPC G)Physics
CPC primaryG01N21/956
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A Mueller ellipsometer of the type having a first rotating element on an incident beam side of a sample and a second rotating element on a reflected beam side of the sample and a detector having an integration time, having a controller for selectively and separately adjusting (1) a first angular frequency of the first rotating element and (2) a second angular frequency of the second rotating element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.