Patent · US Active

Molybdenum containing targets

US8449818B2 · kind B2 · utility

5Cited by

18References

22Claims

0Family size

Assignee

H.C. STARCK INC. · US

Inventors

Gary Alan Rozak · Akron, US
Mark E. Gaydos · Nashua, US
Patrick Hogan · Somerville, US
Shuwei Sun · Framingham, US

Key dates

Filing date	Jun 30, 2010
Grant date	May 28, 2013
Priority date	—
Expiry date	Apr 14, 2031

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T428/31678
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

The invention is directed at sputter targets including 50 atomic % or more molybdenum, a second metal element of titanium, and a third metal element of chromium or tantalum, and deposited films prepared by the sputter targets. In a preferred aspect of the invention, the sputter target includes a phase that is rich in molybdenum, a phase that is rich in titanium, and a phase that is rich in the third metal element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.