CMOS compatible microneedle structures
US8452369B2 · kind B2 · utility
15Cited by
1References
23Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Mar 6, 2008 |
| Grant date | May 28, 2013 |
| Priority date | — |
| Expiry date | Dec 29, 2030 |
Classification
- Technology area (CPC A)Human Necessities
- CPC primaryA61M2037/0053
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention provides an electronic device for sensing and/or actuating, the electronic device comprising at least one microneedle (10) on a substrate (1), each of the microneedles (10) comprising at least one channel (7, 8) surrounded by an insulating layer (6). The present invention also provides a method for making such an electronic device for sensing and/or actuating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.