Patent · US Active

Method and system for indirect determination of local irradiance in an optical system

US8454230B2 · kind B2 · utility

1Cited by

6References

39Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Frank Melzer · Utzmemmingen, DE
Axel Scholz · Aalen, DE

Key dates

Filing date	Feb 16, 2010
Grant date	Jun 4, 2013
Priority date	—
Expiry date	Dec 27, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG01J2005/0077
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention concerns a method for the indirect determination of local irradiance in an optical system; wherein the optical system comprises optical elements between which an illuminated beam path is formed and a measurement object which absorbs the radiation in the beam path at least partially is positioned in a partial region of the beam path selected for the locally-resolved determination of the irradiance and the temperature distribution of at least one part of the measurement object is determined by means of a temperature detector.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.