Micro/nano devices fabricated from Cu-Hf thin films
US8458811B2 · kind B2 · utility
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9Claims
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Key dates
| Filing date | Mar 25, 2011 |
| Grant date | Jun 4, 2013 |
| Priority date | — |
| Expiry date | Mar 25, 2031 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y35/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An all-metal microdevice or nanodevice such as an atomic force microscope probe is manufactured from a copper-hafnium alloy thin film having an x-ray amorphous microstructure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.