MEMS accelerometer with enhanced structural strength
US8459115B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 10, 2010 |
| Grant date | Jun 11, 2013 |
| Priority date | — |
| Expiry date | Jul 3, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0857
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention discloses a MEMS (Micro-Electro-Mechanical System, MEMS) accelerator with enhanced structural strength. The MEMS accelerator is located on a substrate, and it includes: multiple springs, wherein each spring includes: an anchor, fixed on the substrate; an extensible part, which has a fixed end fixed on the anchor, and a free end floating above the substrate; a proof mass, connected to the free ends of the springs; and multiple in-plane sense electrodes, wherein the extensible part is folded back and forth to form a substantially polygon shape as a whole, in which the fixed end is located within the middle one third length of one side of the substantially polygon shape, and the free end is located within the middle one third length of an opposite side of the substantially polygon shape.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.