Material gas concentration control system
US8459290B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Oct 30, 2009 |
| Grant date | Jun 11, 2013 |
| Priority date | — |
| Expiry date | Jan 14, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/2708
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A material gas concentration control system for keeping a concentration of a material gas in a mixed gas constant comprising a tank to accommodate the material, an inlet line to input a carrier gas for evaporating the accommodated material into the tank, and an outlet line to output the mixed gas consisting of the material gas evaporated in the tank and the carrier gas, and further comprising a first valve arranged in the inlet line, a concentration measuring part that measures the concentration of the material gas in the mixed gas, and a concentration control part that controls an open degree of the first valve so as to make the measured concentration of the material gas measured by the concentration measuring part become the previously determined set concentration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.