Method for determining the sensitivity of an acceleration sensor or magnetic field sensor

US8461833B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Johannes Classen · Reutlingen, DE
• Arnd Kaelberer · Neckargemünd, DE
• Hans-Joerg Faisst · Kirchentellinsfurt, DE
• Axel Franke · Ditzingen, DE
• Mirko Hattass · Stuttgart, DE
• Holger Rank · Ditzingen, DE
• Robert Sattler · Grosse Pointe Shores, US
• Alexander Buhmann · Reutlingen, DE
• Ramona Maas · Kaiserslautern, DE
• Marian Keck · Herrenberg, DE

Key dates

• Filing date: Nov 9, 2010
• Grant date: Jun 11, 2013
• Expiry date: Nov 23, 2031

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P21/00
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for determining the sensitivity of a sensor provides the following steps: a) first and second deflection voltages are applied to first and second electrode systems of the sensor, respectively, and first and second electrostatic forces are exerted on an elastically suspended seismic mass of the sensor by the first and second electrode systems, respectively, and a restoring force is exerted on the mass as a result of the elasticity of the mass, and a force equilibrium is established among the first and second electrostatic forces and the restoring force, and the mass assumes a deflection position characteristic of the force equilibrium, and an output signal characteristic of the force equilibrium and of the deflection position is measured; and b) the sensitivity of the sensor is computed on the basis of the first and second deflection voltages.