Hybrid system having a non-MEMS device and a MEMS device
US8461935B2 · kind B2 · utility
9Cited by
3References
73Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 30, 2010 |
| Grant date | Jun 11, 2013 |
| Priority date | — |
| Expiry date | Aug 24, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/2426
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A hybrid system having a non-MEMS device and a MEMS device is described. The apparatus includes a non-MEMS device and an integrated circuit including a MEMS device, the integrated circuit formed on a substrate. The integrated circuit includes a control circuit for the non-MEMS device and a MEMS control circuit for the MEMS device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.